Project Structure
NanoCMM project has been organized in the following workpackages:
- Project Management, Strategy Update, and IPR Protection
- Tactile Probe Systems for Micro- and Nano-Structures
- Optical Probe Systems for Micro- and Nano-Structures
- Improvement & Adaptation of the Probes and the Motion Systems
- Test Beds, Pilot Implementations, Test measurements, Demonstrations of Entire CMM Systems
- Software & Measurement Strategies
- Reference Standards, Specification, Verification, Meaurement. Uncertainty
- Dissemination